Controller IMP-TH24 Micro epsilon VietNam, LTD đại lý Micro epsilon, Micro epsilon

Controller IMP-TH24 Micro epsilon VietNam, LTD đại lý Micro epsilon

White light interferometer for high precision wafer inspection
The IMS5420 is a high-performance white light interferometer for non-contact thickness measurement of monocrystalline silicon wafers.

The controller has a broadband superluminescent diode (SLED) with a wavelength range of 1,100 nm. This enables the thickness measurement of undoped, doped and highly doped SI wafers with only one measuring system.

The IMS5420 achieves a signal stability of less than 1 nm. The thickness can be measured from a distance of 24 mm.